Experiments with microscale notches of variable radius of curvature and stress concentration factor reveal specimen size effects in failure of brittle materials used in MEMS

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RELEVANT PUBLICATIONS

1. A. McCarty and I. Chasiotis, "Description of Brittle Failure of Non-uniform MEMS Geometries", Thin Solid Films 515, pp. 3267-3276, (2007).
    
2. I. Chasiotis, W.G. Knauss, "The Mechanical Strength of Polysilicon Films: 1. The Influence of  Fabrication Governed Surface Conditions", J. of the Mechanics and Physics of Solids 51 (8) pp. 1533-1550, (2003).
    
3. I. Chasiotis, W.G. Knauss, "The Mechanical Strength of Polysilicon Films: 2. Size Effects Associated with Elliptical and Circular Perforations", J. of the Mechanics and Physics of Solids 51 (8), pp. 1551-1572, (2003).

College of Engineering   University of Illinois at Urbana-Champaign